Plasma processing and processing science [electronic resource] / Panel on Plasma Processing, Naval Studies Board, Commission on Physical Sciences, Mathematics, and Applications, National Research Council.

Contributor(s):

Chen, Francis F, 1929-
ebrary, Inc
National Research Council (U.S.). Commission on Physical Sciences, Mathematics, and Applications
National Research Council (U.S.). Naval Studies Board
National Research Council (U.S.). Panel on Plasma Processing

Series: NRL strategic seriesPublication details: Washington, D.C. : National Academy Press, 1995.Description: x, 35 pISBN:

0309575168

Subject(s):

Plasma engineering
Plasma etching
Semiconductors -- Etching

Genre/Form:

Electronic books.

DDC classification:

621.044 22

LOC classification:

TA2020 .P5 1995eb

Online resources:

Click here to access online

Item type:

eBooks

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Committee chair: Francis F. Chen.

This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2009. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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