Electron-beam-induced nanometer-scale deposition / edited by Natalia Silvis-Cividjian, Cornelis W. Hagen.

Contributor(s):

text

Media type:

computer

Carrier type:

online resource

ISBN:

9780080465357
0080465358
0120147858
9780120147854
6610707480
9786610707485

Subject(s):

Genre/Form:

Electronic books.

Additional physical formats: Print version:: Electron-beam-induced nanometer-scale deposition.LOC classification:

T174.7 .E44 2006eb
TA

Online resources:

Click here to access online

Contents:

Introduction. -- Electron-beam-induced nanometer-scale deposition: a literature survey. -- The theory of EBID spatial resolution. -- The role of secondary electrons in EBID. -- Delocalization effects in EBID.

Summary: Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.

Item type:

eBooks

Average rating: 0.0 (0 votes)

Holdings ( 0 )
Title notes ( 5 )

No physical items for this record

Includes bibliographical references (pages 219-235) and index.

Advances in Imaging and Electron Physics merges two long-running serials-Advances in Electronics and Electron Physics and Advances in Optical and Electron Microscopy. This series features extended articles on the physics of electron devices (especially semiconductor devices), particle optics at high and low energies, microlithography, image science and digital image processing, electromagnetic wave propagation, electron microscopy, and the computing methods used in all these domains.

Print version record.

Elsevier ScienceDirect All Books