TY  - BOOK
AU  - Chen,Francis F.
ED  - ebrary, Inc.
ED  - National Research Council (U.S.).
ED  - National Research Council (U.S.).
ED  - National Research Council (U.S.).
TI  - Plasma processing and processing science
T2  - NRL strategic series
SN  - 0309575168
AV  - TA2020 .P5 1995eb
U1  - 621.044 22
PY  - 1995///
CY  - Washington, D.C.
PB  - National Academy Press
KW  - Plasma engineering
KW  - Plasma etching
KW  - Semiconductors
KW  - Etching
KW  - Electronic books
KW  - local
N1  - Committee chair:  Francis F. Chen; This work was performed under Department of Navy Contract N00014-93-C-0089 issued by the Office of Naval Research under contract authority NR 201-124; Electronic reproduction; Palo Alto, Calif.; ebrary; 2009; Available via World Wide Web; Access may be limited to ebrary affiliated libraries
UR  - http://ezproxy.alfaisal.edu/login?url=http://site.ebrary.com/lib/alfaisal/Doc?id=10071430
ER  -