Ceramics processing in microtechnology - Ritzhaupt-Kleissl, H.-J.; Johander, Per.; ebrary, Inc. (Dunbeath, Scotland : Whittles Pub. ; Boca Raton, Fla. : CRC Press, 2009)
Includes bibliographical references and index.
Electronic reproduction.
Keywords: Micromechanics; Ceramic materials -- Microstructure; Microtechnology; Electronic books