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FBAR, MEMS and NEMS resonator design and applications [electronic resource] / Humberto Campanella.

By: Contributor(s): Publication details: Boston : Artech House, c2010.Description: xv, 345 p. : illISBN:
  • 9781607839774
Subject(s): Genre/Form: LOC classification:
  • TK5981 .C36 2010eb
Online resources:
Item type: eBooks
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Includes index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2010. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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