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Micro electro mechanical systems (MEMS) [electronic resource] : technology, fabrication processes and applications / Britt Ekwall and Mikkel Cronquist, editors.

Contributor(s): Series: Nanotechnology science and technology seriesPublication details: Hauppauge, N.Y. : Nova Science Publishers, c2010.Description: xii, 391 p. : ill. (some col.)ISBN:
  • 9781608764747 (hardcover : alk. paper)
  • 9781613246986 (e-book)
Subject(s): Genre/Form: DDC classification:
  • 621 22
LOC classification:
  • TK7875 .M5284 2010eb
Online resources:
Item type: eBooks
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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