Two-dimensional periodic nanoscale patterning of solid surfaces by four-beam standing wave excimer laser lithography / D. O. Filatov.

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Series: Lasers and electro-optics research and technology seriesPublisher: New York : Nova Science Publishers, Inc., 2010Copyright date: �2010Description: 1 online resource (99 pages) : illustrationsContent type:

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Includes bibliographical references and index.

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Electronic reproduction. Ann Arbor, MI : ProQuest, 2016. Available via World Wide Web. Access may be limited to ProQuest affiliated libraries.