CW beam processing of silicon and other semiconductors / volume editor, James F. Gibbons.
Series: Semiconductors and semimetals ; v. 17.1984Description: 1 online resource (xii, 458 pages) : illustrationsContent type:- text
- computer
- online resource
- 9780080864075
- 0080864074
- 0127521178
- 9780127521176
- QC611.8.S5 C9 1984
- digitized 2010 HathiTrust Digital Library committed to preserve
eBooks
Includes bibliographical references and index.
Beam processing of silicon / J.F. Gibbons -- Temperature distributions and solid phase reaction rates produced by scanning CW beams / A. Lietoila [and others] -- Applications of CW beam processing to ion implanted crystalline silicon / A. Lietoila, J.F. Gibbons -- Electronic defects in CW transient thermal processed silicon / N.M. Johnson -- Beam recrystallized polycrystalline silicon / K.F. Lee, T.J. Stultz, J.F. Gibbons -- Metal-silicon reactions and silicide formation / T. Shibata [and others] -- CW bean processing of gallium arsenide / Y.I. Nissim, J.F. Gibbons.
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Print version record.
SEMICONDUCTORS & amp; SEMIMETALS V17.
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