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Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor.

Contributor(s): Series: Engineering tools, techniques and tables | Nanotechnology science and technology seriesPublication details: New York : Nova Science, c2011.Description: xii, 284 p. : ill. (some col.)ISBN:
  • 1617618373 (hardcover)
  • 9781611221237
  • 9781617618376 (hardcover)
Subject(s): Genre/Form: DDC classification:
  • 621.3815/31 22
LOC classification:
  • TK7872.M3 L58 2011eb
Online resources:
Item type: eBooks
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Includes bibliographical references and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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