Lithography [electronic resource] : principles, processes and materials / Theodore C. Hennessy, editor.
Series: Engineering tools, techniques and tables | Nanotechnology science and technology seriesPublication details: New York : Nova Science, c2011.Description: xii, 284 p. : ill. (some col.)ISBN:- 1617618373 (hardcover)
- 9781611221237
- 9781617618376 (hardcover)
- 621.3815/31 22
- TK7872.M3 L58 2011eb

Includes bibliographical references and index.
Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.