Diamond films : chemical vapor deposition for oriented and heteroepitaxial growth / Koji Kobashi.
2005Edition: 1st edDescription: 1 online resource (xii, 336 pages) : illustrationsContent type:- text
- computer
- online resource
- 9780080447230
- 0080447236
- 9780080525570
- 0080525571
- TP873.5.D5 K63 2005eb
eBooks
1. Overview of Oriented Growth -- 2. Diamond -- Structure and CVD Growth -- 3. Microwave Plasma CVD Reactors -- 4. Other CVD Reactors -- 5. Crystal Orientations and Film Surface Morphology -- 6. Formation of Twins -- 7. Homoepitaxial Growth -- 8. Surface Reconstruction -- 9. Epitaxial Growth on cBN, Ni, and Other Substrates -- 10. Diamond Nucleation -- 11. HOD Film Growth -- 12. Oriented Growth on Noble Metals -- 13. Properties and Applications of Heteroepitaxial Diamond Films -- 14. Conclusion -- APPENDICES -- Notations and units -- Plasma -- Properties of diamond and other semiconducting materials -- Reconstruction of diamond surfaces -- Materials constants -- Phase diagrams of carbon and metals -- Carbon solubilities in metals -- Biasing and growth conditions for diamond growth.
Includes bibliographical references (pages 319-334) and indexes.
Print version record.
Elsevier ScienceDirect All Books