This book provides a review of the primary industrial hygiene topics relevant to semiconductor processing: chemical and physical agents, and ventilation systems. Chapters include industrial hygiene concerns that are not specific to the semiconductor industry: ergonomics, indoor air quality, personal protective equipment, plan review, and records retention. While much of the information in these chapters can be applied to all industries, the focus and orientation is specific to issues in the semiconductor industry.

Includes bibliographical references and index.

Print version record.

Introduction -- Industrial Hygiene Monitoring -- Industrial Hygiene Monitoring: Physical Agents -- Ventilation -- Personal Protective Equipment (PPE) -- Indoor Air Quality (IAQ) -- Ergonomics -- Industrial Hygiene Recordkeeping -- Plan Review -- Appendix A: Silicon Ingot and Wafer Manufacturing -- Appendix B: Silicon Device Manufacturing Introduction -- Appendix C: III-V (GaAs) -- Appendix D: III-V Device: Microwave IC -- Appendix E: Ion Implanter Maintenance Safety Considerations -- Appendix F: Bibliography -- Glossary and Acronyms -- Index.

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