Silicon science and advanced micro-device engineering II [electronic resource] : selected, peer reviewed papers from the 6th International Symposium on Silicon Science and 2nd International Conference on Advanced Micro-Device Engineering (ISSS&AMDE 2010), December 9-10, 2010, Kiryu City Performing Arts Center, Kiryu, Japan / edited by Osamu Hanaizumi, Masafumi Unno and Kenta Miura.

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Series: Key engineering materials ; v. 497Publication details: Durnten-Zurich : Trans Tech Publications, 2012.Description: 311 p. : ill. (some col.)ISBN:

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Includes bibliographical references and indexes.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2011. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.