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Low-k nanoporous interdielectrics [electronic resource] : materials, thin film fabrications, structures and properties / Moonhor Ree, Jinhwan Yoon and Kyuyoung Heo.

By: Contributor(s): Series: Nanotechnology science and technology seriesPublication details: Hauppauge, N.Y. : Nova Science Publishers, c2010.Description: 67 p. : illISBN:
  • 9781616687496 (softcover)
  • 9781617283185 (e-book)
Subject(s): Genre/Form: DDC classification:
  • 621.381 22
LOC classification:
  • TK7871.15.F5 R44 2010eb
Online resources:
Item type: eBooks
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Includes bibliographical references (p. [51]-61) and index.

Electronic reproduction. Palo Alto, Calif. : ebrary, 2013. Available via World Wide Web. Access may be limited to ebrary affiliated libraries.

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