APA

Geng H., Zhou L., Park I., Ravi K. V., Rathore H. S., Chanda K., Ren L. P., Tu K. N., Coumou D. J., Biltoft P., Howard C., Mack C. A., Graf M., Zhang P., Lai S., Solzbacher F., McInerney E. J., Ramdani J., Vaccari G., Ritzdorf T., Klocke J., Dyer T. S., Machamer A., Blair D. W., Arai K., Kobayashi Y., Otani H., Tonnies D., Topper M., Wang Z. L., Huff M. A., Liu D. N., Curcie W. D., Sweeney J. D., Cox J. C., Cavicchi K., Barsness D., Gould C. K., Albrecht D. J., Li B., Carriker W., Haris C., Peltinov R., Menaker M., Scibilia B., Altis Y. D., McCafferty R. H., Davis B. J., Trammell S. R., Pavlotsky R. V., Beck S. C., Gendreau M., Amick H., Levit L., Muller C., Kochevar S., Gromala J., Pinkowski R. E., McGraw-Hill eBooks & IDC Corporation. (2005). Semiconductor manufacturing handbook. New York: McGraw-Hill.

Chicago

Geng Hwaiyu, Zhou Lin, Park Ilsun, Ravi K V, Rathore Hazara S, Chanda Kaushik, Ren L P, Tu King N, Coumou David J, Biltoft Peter, Howard Charles, Mack Chris A, Graf Michael, Zhang Peng, Lai Shouliang, Solzbacher Florian, McInerney Edward J, Ramdani Jamal, Vaccari Giovanni, Ritzdorf Tom, Klocke John, Dyer Timothy S, Machamer Andrew, Blair Donald W, Arai Kazuhisa, Kobayashi Yoshikazu, Otani Hideaki, Tonnies Dietrich, Topper Michael, Wang Zhong L, Huff Michael A, Liu David N, Curcie Wayne D, Sweeney Joseph D, Cox James C, Cavicchi Kristin, Barsness Dan, Gould Charles K, Albrecht David J, Li Bo, Carriker Wayne, Haris Clint, Peltinov Ram, Menaker Mina, Scibilia Bruno, Altis Yoan Dupret, McCafferty Robert H, Davis Brett J, Trammell Steven R, Pavlotsky Richard V, Beck Stephen C, Gendreau Michael, Amick Hal, Levit Larry, Muller Chris, Kochevar Steven, Gromala Jerry, Pinkowski Richard E, McGraw-Hill eBooks and IDC Corporation. 2005. Semiconductor manufacturing handbook. New York: McGraw-Hill.

Harvard

Geng H., Zhou L., Park I., Ravi K. V., Rathore H. S., Chanda K., Ren L. P., Tu K. N., Coumou D. J., Biltoft P., Howard C., Mack C. A., Graf M., Zhang P., Lai S., Solzbacher F., McInerney E. J., Ramdani J., Vaccari G., Ritzdorf T., Klocke J., Dyer T. S., Machamer A., Blair D. W., Arai K., Kobayashi Y., Otani H., Tonnies D., Topper M., Wang Z. L., Huff M. A., Liu D. N., Curcie W. D., Sweeney J. D., Cox J. C., Cavicchi K., Barsness D., Gould C. K., Albrecht D. J., Li B., Carriker W., Haris C., Peltinov R., Menaker M., Scibilia B., Altis Y. D., McCafferty R. H., Davis B. J., Trammell S. R., Pavlotsky R. V., Beck S. C., Gendreau M., Amick H., Levit L., Muller C., Kochevar S., Gromala J., Pinkowski R. E., McGraw-Hill eBooks and IDC Corporation. (2005). Semiconductor manufacturing handbook. New York: McGraw-Hill.

MLA

Geng Hwaiyu, Zhou Lin, Park Ilsun, Ravi K V, Rathore Hazara S, Chanda Kaushik, Ren L P, Tu King N, Coumou David J, Biltoft Peter, Howard Charles, Mack Chris A, Graf Michael, Zhang Peng, Lai Shouliang, Solzbacher Florian, McInerney Edward J, Ramdani Jamal, Vaccari Giovanni, Ritzdorf Tom, Klocke John, Dyer Timothy S, Machamer Andrew, Blair Donald W, Arai Kazuhisa, Kobayashi Yoshikazu, Otani Hideaki, Tonnies Dietrich, Topper Michael, Wang Zhong L, Huff Michael A, Liu David N, Curcie Wayne D, Sweeney Joseph D, Cox James C, Cavicchi Kristin, Barsness Dan, Gould Charles K, Albrecht David J, Li Bo, Carriker Wayne, Haris Clint, Peltinov Ram, Menaker Mina, Scibilia Bruno, Altis Yoan Dupret, McCafferty Robert H, Davis Brett J, Trammell Steven R, Pavlotsky Richard V, Beck Stephen C, Gendreau Michael, Amick Hal, Levit Larry, Muller Chris, Kochevar Steven, Gromala Jerry, Pinkowski Richard E, McGraw-Hill eBooks and IDC Corporation. Semiconductor manufacturing handbook. New York: McGraw-Hill. 2005.