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Sputtering materials for VLSI and thin film devices / by Jaydeep Sarkar. by
Edition: First edition.
Publisher: Oxford ; Boston : William Andrew Publishing, 2014
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Sputtering materials for VLSI and thin film devices / Jaydeep Sarkar. by Publisher: Norwich, N.Y. : William Andrew, 2011Distributor: Oxford : Elsevier Science [distributor]
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