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Extreme ultraviolet lithography [electronic resource] / Banqiu Wu, Ajay Kumar, editors.

Contributor(s): Series: McGraw-Hill's AccessEngineeringPublication details: New York : McGraw-Hill, [2009]Description: 1 electronic text (xiv, 465 p.) : illISBN:
  • 0071664793
  • 9780071549189
Subject(s): Genre/Form: DDC classification:
  • 621.3815/31 22
LOC classification:
  • TK7872.M3 E987 2009
Online resources: Available additional physical forms:
  • Also issued in print and PDF version.
Item type: eBooks
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Print version c2009.

Includes bibliographical references and index.

Also issued in print and PDF version.

Description based on cover image and table of contents, viewed on August 20, 2009.

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