Front Matter -- Hall-Current Ion Sources -- Ion Source and Vacuum Chamber. Influence of Various Effects on Ion Beam Parameters -- Oscillations and Instabilities in Hall-Current Ion Sources -- Optimum Operation of Hall-Current Ion Sources -- Cathode Neutralizers for Ion Sources -- Industrial Gridless Broad-Beam Ion Source Producers, Problems and the Need for Their Standardization -- Operation of Industrial Ion Sources with Reactive Gases -- Ion Beam and Radiation Impact on Substrate Heating -- Ion Beam Energy and Current -- Plasma Optical Systems -- Ion and Plasma Sources for Science and Technology -- Ion Assist, and its Different Applications -- Magnetron with Non-Equipotential Cathode -- Index.

Includes bibliographical references and index.

John Wiley and Sons Wiley eBooks