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MEMS Materials and Processes Handbook [electronic resource] / edited by Reza Ghodssi, Pinyen Lin. by Series: MEMS Reference Shelf ; 1Publisher: Boston, MA : Springer US : Imprint: Springer, 2011
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  • The Handbook MEMs Materials and Processes offers a much more detailed treatment than the book by Leondes which is more general in its coverage and certainly less applied
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